Table 1 MD simulation conditions in 3-D nano-machining

Potential function

Tersoff, Morse, EAM, Lennard-Jones

Workpiece

Single-crystal copper

Tool

Diamond

Lattice structure

FCC

Workpiece size

30 × 18 × 8 nm

Tool rake angle α

15°

Tool clearance angle β

8°

Tool edge radius R

3.0 nm

Cutting direction

(100)[100]

Cutting depth

3 nm

Cutting speed

50 m/s