Table 1 Materials and characteristics of DUV-LED
Component | Characteristics | Material |
---|---|---|
DUV-LED | Peak wavelength = 275 nm | AlGaN |
Nanoparticles | Average primary particle size = 14 nm Refractive index (n) = 1.45 Energy gap (Eg) = 9 eV | SiO2 |
Tilt angle reflector sidewall cavity | Tilt angle = 60° Diameter = 2 mm | Aluminum |
Hemispherical Quartz glass | Diameter = 4 mm High = 1.3 mm | Quartz |
Encapsulation structure | Polished | Al2O3 ceramics |
Encapsulation material | Refractive index (n) = 1.45 | Polydimethylsiloxane fluid |