Table 1 Device parameters following ITRS and IRDS requirement
Channel length | EOT (nm) | VDS (V) | Node |
---|---|---|---|
7 nm | 0.5 | 0.68 | 2019 |
5 nm | 0.41 | 0.64 | 2021 |
3 nm | 0.41 | 0.64 | 2024 |
Channel length | EOT (nm) | VDS (V) | Node |
---|---|---|---|
7 nm | 0.5 | 0.68 | 2019 |
5 nm | 0.41 | 0.64 | 2021 |
3 nm | 0.41 | 0.64 | 2024 |