Fig. 2From: Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchantsa TD SEM of a Si(100) wagon-wheel etched in low-concentration TMAH (5 wt.%) at RT and zoom-in (b) showing the development of the faster etching {110} planes/facets, as indicated by the dashed linesBack to article page