Fig. 4From: Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchantsa TD-SEM of a Si(110) wagon-wheel etched in low-concentration TMAH (5 wt.%) at RT and zoom-in (b) showing the facet formation on the <111> oriented spokes. The main crystallographic directions (or equivalent planes) are represented by solid lines, the higher index planes by dashed linesBack to article page