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Fig. 5 | Nanoscale Research Letters

Fig. 5

From: Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants

Fig. 5

TD SEM image of a Si(100) (left) and a Si(110) wagon-wheel (right) etched in low-concentration NH4OH (0.4 wt.%) at RT. Specific crystallographic directions are represented by [ ], a family of equivalent directions by < >. The main crystallographic directions (or equivalent planes) are represented by solid lines, the higher index planes by dashed lines

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