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Table 1 Scaled-down wagon-wheel dimensions. Previously reported wagon-wheel dimensions are shown in the last column

From: Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants

 

This work

Wind et al. (ref. [15])

Wagon-wheel diameter

3.8 μm

16 mm

Spoke length

1 μm

8 mm

Spoke height

600 nm

130 μm

Spoke width (outer)

180 nm

140 μm

Spoke width (inner)

90 nm

2 μm

Spoke angle/space

5.6°/5.6°

1°/1°

Number of spokes

32

180

Amplification factor

20×

115×

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