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Account

Table 1 Process variables used in the MD simulation

From: Atomic-Scale Characterization of Slip Deformation and Nanometric Machinability of Single-Crystal 6H-SiC

Details

Parameters

Size of the workpiece

50 nm× 20 nm× 30 nm

Undeformed chip thickness (d)

5.0 nm

Tip radius

3.0 nm

Cutting rake angle

− 25°

Equilibration temperature

300 K

Cutting velocity

50 ms−1

Timestep

1 fs

Combinations

machining surface/machining direction

Case 1

\( (0001)/\left[2\overline{1}\overline{1}0\right] \)

Case 2

\( (0001)/\left[10\overline{1}0\right] \)

Case 3

\( \left(01\overline{1}0\right)/\left[2\overline{1}\overline{1}0\right] \)

Case 4

\( \left(01\overline{1}0\right)/\left[0001\right] \)

Case 5

\( \left(11\overline{2}0\right)/\left[1\overline{1}00\right] \)

Case 6

\( \left(11\overline{2}0\right)/\left[0001\right] \)

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