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Table 2 Description of surface chemical treatments and metal layers deposited on GaAs (110) substrates for GIXRD analysis

From: Optimization of Ohmic Contacts to p-GaAs Nanowires

Sample#Oxide removalSurface passivationMetal layers
S1HCl:H2OTi (20 nm)
S2HCl:H2O(NH4)2SxTi (20 nm)
S3HCl:H2O(NH4)2SxPt (5 nm)
S4HCl:H2O(NH4)2SxPt/Ti (5/20 nm)