Fig. 5
From: Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array

a MEMS-based fabrication process flow. b Photographs of actual LVOF and its package structure
From: Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array
a MEMS-based fabrication process flow. b Photographs of actual LVOF and its package structure