Effect of Machining-Induced Subsurface Defects on Dislocation Evolution and Mechanical Properties of Materials via Nano-indentation

Table 3 Applied load on spacemen with different indentation depth

Maximum depth 2 nm	Indentation depth	0.5 nm	1 nm	1.5 nm	Maximum load F_max (depth)
Maximum depth 2 nm	Applied load (nN)	45.79	83.56	154.70	190.67 (1.8 nm)
Maximum depth 3 nm	Indentation depth	0.5 nm	1 nm	1.5 nm	244.66 (3.1 nm)
	Applied load (nN)	46.18	87.71	161.49
	Indentation depth	2 nm	2.5 nm	3 nm
	Applied load (nN)	199.40	213.29	234.61