Table 1 Proposed SHPA unit cell dimension
Substrate and HEXA patch (nm) | Patch bar dimension (nm) | ||||||||
---|---|---|---|---|---|---|---|---|---|
l1 and l2 | g1 | Vp1 | hp1 | Ph | mt1 | mt2 | b1 | b2 | g2 |
600 | 10 | 77.94 | 90 | 90 | 80 | 100 | 561 | 39 | 20 |
Substrate and HEXA patch (nm) | Patch bar dimension (nm) | ||||||||
---|---|---|---|---|---|---|---|---|---|
l1 and l2 | g1 | Vp1 | hp1 | Ph | mt1 | mt2 | b1 | b2 | g2 |
600 | 10 | 77.94 | 90 | 90 | 80 | 100 | 561 | 39 | 20 |