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Fig. 2 | Nanoscale Research Letters

Fig. 2

From: A Comparative Study on the Ferroelectric Performances in Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Films Using Tetrakis(ethylmethylamino) and Tetrakis(dimethylamino) Precursors

Fig. 2

The polarization–electric field (P–E) curves of (a) the TDMA HZO and (b) TEMA HZO (reproduced from Ref. [5]) capacitors measured in pristine state and fatigued states pulsed by 102, 103, 104, and 105 times at 3.8 MV/cm-high and 10 μs-wide bipolar rectangular pulses. (c) The changes in 2Pr values of TDMA (black) and TEMA (red) HZO capacitors as a function of fatigue pulses. The dielectric constant–electric field curves of (d) the TDMA HZO and (e) TEMA HZO (reproduced from Ref. [5]) capacitors with the top and bottom TiN electrodes measured in pristine state and fatigued states. (f) The changes in dielectric constant values with increasing number of fatigue pulses for TDMA (black) and TEMA (red) HZO capacitors

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