Fig. 4From: A Comparative Study on the Ferroelectric Performances in Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Films Using Tetrakis(ethylmethylamino) and Tetrakis(dimethylamino) PrecursorsThe polarization–electric field (P–E) curves measured during wake-up test with the fatigue pulse height of (a) 2.8, (b) 3.1, and (c) 3.5 MV/cm. (d) The changes in 2Pr value during the endurance test with 2.8, 3.1, 3.5, and 3.8 MV/cm-high fatigue pulsesBack to article page