Table 2 Comparison of the calculated Al content and Eg of poly-(AlxGa1–x)2O3 after thermal annealing according to HRXRD in Fig. 3 and experimental results of transmittance spectra
800 °C | 900 °C | 1000 °C | 1100 °C | |
---|---|---|---|---|
Substitutional Al composition | 0.02 | 0.14 | 0.22 | 0.35 |
CalculatedEg | 4.67 eV | 4.79 eV | 4.90 eV | 5.13 eV |
ExperimentalEg | 4.72 eV | 4.78 eV | 4.81 eV | 5.10 eV |