Fig. 1From: Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer DepositionALD-grown ZnO films on sapphire substrates with pulse sequence H2O/N2/O3/N2/DEZn/N2 using DI water, O3, and Zn(C2H5)2 as the precursorsBack to article page