Fig. 2From: Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer DepositionXRD patterns of ZnO films with crystalline orientations along (002) and (101) directions of the specimens. The arrows indicate the diffraction angles 34.4° and 36.2° of (002) and (101) of bulk ZnO, respectivelyBack to article page