Fig. 6From: Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer DepositionA pyramid diagram. In the pyramid, four triangles are illustrated in different colors. Three triangles at the edges of the pyramid show key growth and processing conditions of ZnO. Combination of these three crucial components in the growth promotes quality of ALD ZnO epilayers shown by the triangle at the center of the pyramidBack to article page