Table 2 Carrier concentration, mobility, and resistivity of Hall effect measurements and root mean square (rms) surface roughness estimated by AFM images of specimens
Sample | Carrier concentration (cm−3) | Mobility (cm2/Vs) | Resistivity (Ωcm) | Dnr1 | EA1 (meV) | Dnr2 | EA2 (meV) | Roughness (nm) |
|---|---|---|---|---|---|---|---|---|
A | 3.4 × 1019 | 19 | 9.7 × 10−3 | 6.26 | 3.6 | 132.7 | 22.3 | 1.92 |
B | 4.6 × 1017 | 1.1 | 1.2 × 101 | 4.3 | 3.4 | 153.6 | 25.6 | 4.30 |
C | 9.4 × 1015 | 6.1 | 1.1 × 102 | 5.29 | 3.5 | 110.8 | 21.7 | 2.18 |