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Fig. 3 | Nanoscale Research Letters

Fig. 3

From: Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Fig. 3

Integrated band intensity and normalized of CpZr(NMe2)3 spectra main peak focus on spectra region a –CH2– stretching (840 to 740 cm−1), b NC2 symmetric (970 to 910 cm−1), c N–CH3 symmetric (2795 to 2745 cm−1), d –CH3 deforming (1270 to 1220 cm−1) and e C=N stretching (1480 to 1425 cm−1) bands, f the integrated intensity ratio of main peak/N–CH3 peak areas

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