Fig. 4From: Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer DepositionQMS analysis data of CpZr(NMe2)3 a 0 to 300 amu, b 0 to 80 amu, and c 13 to 30 amuBack to article page