Fig. 5From: Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer DepositionThe expected main decomposition mechanisms of CpZr(NMe2)3 on gas phasesBack to article page