Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Table 2 Mass per amu of CpZr(NMe₂)₃ main thermal decomposition product and its fragment

Mass/amu	Decomposition product
1	Hydron
2	Hydrogen
15	Methyl
16	Methane
22	Methylmethyleneimine fragment
28	N-ethylmethanimine fragment
30	Trimethylamine fragment
43	Methylmethyleneimine
44	Tetramethylhydrazine fragment
45	Dimethylamine
57	N-ethylmethanimine
59	Trimethylamine
65	Cyclopentadienyl
88	Tetramethylhydrazine