Fig. 4
Sensing performance of two types of sensors for 9.4% RH. a Schematic of the FET-type sensor and the pulse scheme used for the measurement of the FET-type sensor in this work. b |ID| of FET-type sensor based on pMOSFET decreased obviously as RH increased from 3.3 to 9.4%. The sensor was blown with humid air for 100 s from about 70 to 170 s. c DC transient measurement of the resistive-type sensor and no response was observed from the resistive-type sensor for 9.4% RH