Table 1 Resistivity and Mg, C, H, and O concentrations for Mg-doped p-GaN samples
From: Hydrogen Can Passivate Carbon Impurities in Mg-Doped GaN
Sample | Resistivity (Ω cm) | Mg (cm−3) | C (cm−3) | H (cm−3) |
|---|---|---|---|---|
A1 | 1.39 | 2.87E+19 | 1.17 E+17 | 1.70E+18 |
A2 | 4.95 | 3.14E+19 | 8.00E+17 | 8.70E+17 |
A3 | 47.7 | 2.39E+19 | 1.12E+19 | 4.11E+17 |
B1 | 1.49 | 1.10E+19 | 2.40E+16 | 4.60E+17 |
B2 | 2.35 | 1.08E+19 | 4.13E+17 | 2.81E+18 |
C1 | 1.95 | 1.60E+19 | 2.90E+17 | 1.50E+18 |
C2 | 2.95 | 1.40E+19 | 4.20E+17 | 4.59E+18 |