Table 2 Summary of actuation mechanisms for MEMS-based sensor devices
From: A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Actuation technique | Technology/device | Operation principle | Applications | Year | Refs. |
|---|---|---|---|---|---|
Electrostatic | BioMEMS sensor | Capacitive based Interdigitated electrodes (IDE) | Biosensor application | 2019 | [56] |
Electrostatic | Microcantilever -based MEMS sensors | Capacitive sensing | Humidity Sensor | 2019 | [57] |
Electrostatic | MEMS nanopositioning system | Sigma-delta type arrangement | Nanopositioner | 2016 | [58] |
Electrostatic | Bistable MEMS switch | Pull-in voltage | Switch applications | 2016 | [59] |
Electrostatic | MEMS resonators | Parallel-plate model | closed-loop noise of MEMS oscillators | 2016 | [60] |
Electrostatic | MEMS gyroscope | Comb drives or parallel plate capacitors | Navigation (automobile GPS) | 2016 | [62] |
Electrostatic | CMOS-MEMS resonator | Interdigitated comb actuator | Mass-Sensitive Gas Sensors | 2014 | [63] |
Electrostatic | CMOS-MEMS resonator | Biomarker Detection in Exhaled Breath | 2015 | [82] | |
Electrothermal | MEMS-based acetone vapour sensor | Different coefficients of thermal expansion (CTEs) | Diabetes screening | 2018 | [66] |
Electrothermal | CMOS-MEMS device | Different CTEs | Humidity sensing purpose | 2017 | [4] |
Electrothermal | MEMS resonator based filters | U-shape double-clamped beam | Filter components | 2016 | [67] |
Electrothermal | CMOS-MEMS sensor | Different CTEs | Humidity Sensing | 2015 | [44] |
Electrothermal | Tuneable MEMS ring resonator | Different CTEs of materials | Filtering Applications | 2015 | [68] |
Thermo-Electric | MetalMUMPs device | Different CTEs of materials | Out-of-Plane micrometric Displacements | 2014 | [121] |
Thermal actuation | A MEMS-based electrostatic field sensor (EFS) | Clamp-clamp beam | Modulate the external electrostatic field | 2014 | [122] |
Electromagnetic | MEMS actuator | Lorentz force | Optical switches, and micro scanners | 2015 | [69] |
Piezoelectric | Mass-sensor based micro-cantilevers | ZnO thin films | A bio-or chemical event detection | 2019 | [48] |