Table 3 Longitudinal and transverse piezoresistance coefficient of polysilicon [19]
From: A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Parameter | P-type polysilicon | n-type polysilicon |
|---|---|---|
πL | 58.8 × 10–11/Pa | − 45.4 × 10–11/Pa |
πT | − 18.5 × 10–11/Pa | 34.5 × 10–11/Pa |