Fig. 4From: Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applicationsThe 3D view of surface morphologies of Z-cut LN, X-cut LN and BTO measured by AFM. a As-deposited and b etched Z-cut LN. c As-deposited and d etched X-cut LN. e As-deposited and f etched BTOBack to article page