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Account

Table 1 Parameters of the MD simulation model

From: Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon

Parameters

Value

Length l

108.6 nm

Height h

70.6 nm

Width w

4.3 nm

Nominal cutting direction

(001)/[\(\stackrel{\mathrm{-}}{1}\)00]

Tool rake/clearance angle

0°/10°

Total atoms in workpiece

1,327,001

Phase difference φ

90°

Amplitude in the nominal cutting direction Ac

40 nm

Amplitude in the DOC direction Ad

40 nm

Nominal DOC

40 nm

Vibration frequency f

500 MHz

Nominal cutting speed

3.125 m/s

Tool edge radius

7.14 nm

Ambient temperature

300 K, 600 K, 900 K, 1200 K

Timestep

1 fs

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