Table 1 Sheet resistance variations of the test pieces with different metal nanoparticles
Nanoparticles | Heating conditions | Sheet resistances of the test pieces (Ω/sq) | |
---|---|---|---|
Before heating | After heating | ||
Pt | 250 °C, 30 min | Insulated | Several tens to hundreds |
Ag | 250 °C, 30 min | Insulated | Insulated |
Au | 250 °C, 30 min | Insulated | Insulated |
None | 250 °C, 30 min | Insulated | Insulated |