Fig. 6From: 2D Semiconductor Nanomaterials and Heterostructures: Controlled Synthesis and Functional ApplicationsNumber of annual citations on “Atomic layer deposition” topic a of published manuscripts. Data are according to Web of Knowledge™ Database. Comparison of the deposition rate vs step coverage (b) and coverage areas produced by different deposition techniques (c). Comparative analysis of properties of SE fabricated by PVD, CVD, and ALD, respectively (d). Reproduced with permission from [94]Back to article page