Fig. 6
From: Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

The injected dosage and its accelerating energy can be precisely reflected by the resulting BL current of the e-beam exposed array
From: Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
The injected dosage and its accelerating energy can be precisely reflected by the resulting BL current of the e-beam exposed array