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Table 1 Detailed ALD experimental parameters for the AZO conductive layer

From: Correction to: The Design of the AZO Conductive Layer on Microchannel Plate

ZnO: \({\text{Al}}_{2} {\text{O}}_{3} = 4 + \frac{N}{N + 1}:1\) \(\left( {\begin{array}{*{20}c} {{\text{ZnO}}} \\ {{\text{Al}}_{2} {\text{O}}_{3} } \\ \end{array} } \right) = \left( {\begin{array}{*{20}c} 1 \\ N \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} {{\text{ZnO}}} \\ {{\text{Al}}_{2} {\text{O}}_{3} } \\ \end{array} } \right) = \left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + N\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) \(\% {\text{ZnO}} = \frac{{{\text{ZnO}}}}{{{\text{ZnO}} + {\text{Al}}_{2} {\text{O}}_{3} }}*100(\% )\)
\(4 + \frac{1}{2}:1\) \(\left( {\begin{array}{*{20}c} 1 \\ 1 \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + 1\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) 81.82
\(4 + \frac{2}{3}:1\) \(\left( {\begin{array}{*{20}c} 1 \\ 2 \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + 2\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) 82.35
\(4 + \frac{3}{4}:1\) \(\left( {\begin{array}{*{20}c} 1 \\ 3 \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + 3\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) 82.61
\(4 + \frac{4}{5}:1\) \(\left( {\begin{array}{*{20}c} 1 \\ 4 \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + 4\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) 82.76
\(4 + \frac{5}{6}:1\) \(\left( {\begin{array}{*{20}c} 1 \\ 5 \\ \end{array} } \right)\left[ {\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right)\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)} \right]\) \(\left( {\begin{array}{*{20}c} 4 \\ 1 \\ \end{array} } \right) + 5\left( {\begin{array}{*{20}c} 5 \\ 1 \\ \end{array} } \right)\) 82.86