Fig. 2From: Multicolor Emission from Ultraviolet GaN-Based Photonic Quasicrystal Nanopyramid Structure with Semipolar InxGa1−xN/GaN Multiple Quantum WellsThe schematic of the GaN PQC structure fabrication process. Including epitaxial growth of a GaN wafer (step 1), NIL of PQC patterns (step 2), dry etching (steps 3 and 4), and pyramid-on-nanorods MQW structure after regrowth (step 5)Back to article page