Fig. 8

Surface micro-/nano-patterning techniques: a a process flow of soft lithography (Reproduced with permission from Ref. [67]); b SE-TENG device schematic and fabrication (Reproduced with permission from Ref. [68]); c a process of the glass transition of the PS for obtaining nano-to-micro scale morphology (Reproduced with permission from Ref. [69]); d an illustration of the fabrication of the dome-shaped and pillar-shaped nanostructures by the replica molding process on the silicon wafers, and their surface taken by an atomic force microscope (Reproduced with permission from Ref. [70])