Fig. 15From: Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELsa Superposition of normalized Ga3d-In4d spectra for ALD and PEALD samples without, with a 30’ (NH4)2S or with a NH4OH + 30’ (NH4)2S surface treatment, b proportion of O1s components and total indium contribution using In4d line [86]Back to article page