Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

Table 1 FDTD parameters at wavelength of 13.5 nm

Dielectric	Refractive index	Extinction coefficient	REF
Copper oxide (CuO)	0.948	0.072	[20]
Silicon dioxide (SiO₂)	0.97352	0.01608	[21]
Aluminum oxide (Al₂O₃)	0.9714	0.035	[22]