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Correction: Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs

The Original Article was published on 18 November 2021

Correction to: Nanoscale Research Letters (2021) 16:164 https://doi.org/10.1186/s11671-021-03623-x

Following publication of the original article, it was brought to the authors’ attention that one of the funding names in the funding list had been left out.

Namely, the information in the Funding declaration: “This research was supported by the National Natural Science Foundation of China (11,904,302), Science and Technology Plan Project in Fujian Province of China (2021H0011), Major Science and Technology Project of Xiamen, China (3502Z20191015), and Hong Kong University of Science and Technology - oshan Joint Research Program (FSUST19-FYTRI11)”, had been incorrectly written as “This research was supported by the National Natural Science Foundation of China (11904302), Science and Technology Plan Project in Fujian Province of China (2021H0011), and Major Science and Technology Project of Xiamen, China (3502Z20191015).”

The error has since been corrected in the original article.

The authors apologize for any inconvenience caused.

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Correspondence to Tingzhu Wu or Hao-Chung Kuo.

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Yeh, YW., Lin, SH., Hsu, TC. et al. Correction: Advanced Atomic Layer Deposition Technologies for Micro-LEDs and VCSELs. Nanoscale Res Lett 17, 25 (2022). https://doi.org/10.1186/s11671-022-03664-w

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  • DOI: https://doi.org/10.1186/s11671-022-03664-w