Fig. 2
From: Tuning of Thermoelectric Properties of MoSe2 Thin Films Under Helium Ion Irradiation
a HRXRD patterns of He+-irradiated MoSe2 films on mica substrates (āSā denotes mica substrate peaks) and b a magnified view of the MoSe2 (002) peaks with a distinctive shift. c Peak positions and FWHM of MoSe2 (002) as a function of the irradiation dose. d The c-axis lattice parameter and Se/Mo ratio obtained from HRXRD and EDS, respectively, as a function of the irradiation dose