Fig. 3From: Defect Inspection Techniques in SiCVarious kind of defects appearing in SiC wafers. a Schematic cross-sectional view of SiC defects and image of b TEDs and TSDs [15], c BPDs [15], d Micropipes [16], e SFs [15], f carrot defects [16], g polytype inclusions [15], h Scratches [17]Back to article page