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Table 3 Research on various inspection methods and inspected defect types

From: Defect Inspection Techniques in SiC

 

Non-optical

Optical

 

Inspection

Metrology

Inspection

Metrology

 

KOH

SEM

AFM

TEM

CL

MPJ

OCT

DIC

XRT

PL

Raman

Crystal defect

           

Micropipe

[45]

[16]

[69]

[70]

[71]

X

O

O

[72]

[15]

[48]

TSD/TED

[45, 46, 73]

[73]

O

[74]

[47]

[51, 73]

O

O

[16, 75]

[15, 61, 76]

[48]

BPD

[46, 73]

X

X

[74]

[77]

[51, 73]

X

X

[75]

[15, 61]

O

SF

[78]

[16]

O

[43, 46, 74]

[47]

[51]

O

O

[76]

[15, 61, 46]

[17]

Surface defect

           

Scratch

 

[79]

[79]

 

O

[51, 79]

O

O

[15, 80]

X

[17]

Carrot

 

[16]

O

 

[81]

[82]

[33]

[82]

[83]

[15]

O

Triangular

 

[16]

[25]

 

[71]

O

[33]

[84]

[84]

[85]

[84,85,86]

Downfall

 

[87]

O

 

[87]

X

O

O

X

X

O

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