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Table 3 Research on various inspection methods and inspected defect types

From: Defect Inspection Techniques in SiC

  Non-optical Optical
  Inspection Metrology Inspection Metrology
  KOH SEM AFM TEM CL MPJ OCT DIC XRT PL Raman
Crystal defect            
Micropipe [45] [16] [69] [70] [71] X O O [72] [15] [48]
TSD/TED [45, 46, 73] [73] O [74] [47] [51, 73] O O [16, 75] [15, 61, 76] [48]
BPD [46, 73] X X [74] [77] [51, 73] X X [75] [15, 61] O
SF [78] [16] O [43, 46, 74] [47] [51] O O [76] [15, 61, 46] [17]
Surface defect            
Scratch   [79] [79]   O [51, 79] O O [15, 80] X [17]
Carrot   [16] O   [81] [82] [33] [82] [83] [15] O
Triangular   [16] [25]   [71] O [33] [84] [84] [85] [84,85,86]
Downfall   [87] O   [87] X O O X X O