Table 3 Research on various inspection methods and inspected defect types
Non-optical | Optical | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
Inspection | Metrology | Inspection | Metrology | ||||||||
KOH | SEM | AFM | TEM | CL | MPJ | OCT | DIC | XRT | PL | Raman | |
Crystal defect | |||||||||||
Micropipe | [45] | [16] | [69] | [70] | [71] | X | O | O | [72] | [15] | [48] |
TSD/TED | [73] | O | [74] | [47] | O | O | [48] | ||||
BPD | X | X | [74] | [77] | X | X | [75] | O | |||
SF | [78] | [16] | O | [47] | [51] | O | O | [76] | [17] | ||
Surface defect | |||||||||||
Scratch | [79] | [79] | O | O | O | X | [17] | ||||
Carrot | [16] | O | [81] | [82] | [33] | [82] | [83] | [15] | O | ||
Triangular | [16] | [25] | [71] | O | [33] | [84] | [84] | [85] | |||
Downfall | [87] | O | [87] | X | O | O | X | X | O |