Table 1 Simulation parameters
Parameters | Values |
---|---|
Atoms in workpiece | 3,075,800 |
Atoms in tool | Single indenter: 5523 Indenter array: 49,707 |
Normal load | Single indenter: 441.8 nN Indenter array: 2863.1 nN (Spacing = 5 nm) 3578.9 nN (Spacing = 10 nm) |
Spacing distance | 5 nm, 10 nm |