Fig. 6

HRTEM images of the effectively suspended zone, and the strain map distribution (a, c). HRTEM images of plain SOI sample, and the strain map distribution (b, d). The strain map distribution and its respective vertical line profile along the \(\varepsilon _{xx}\) direction (a, b), and the \(\varepsilon _{yy}\) direction (c, d). In each image, the GPA maps are generated by defining an unstrained reference area in the Si layer, and the strain values are the relative value of the compressed Si lattice. To emphasize the contrast at the Si area, the color scale was tuned at \(-0.5\%\) to +0.5\(\%\)