Table 1 Lattice parameter of Si layer near the AlN/Si interface
Material | Unstrained Si | Suspended Si nanofilm | Top Si layer on SOI |
---|---|---|---|
Lattice constant (Å) | 5.428 | 5.265 | 5.374 |
Material | Unstrained Si | Suspended Si nanofilm | Top Si layer on SOI |
---|---|---|---|
Lattice constant (Å) | 5.428 | 5.265 | 5.374 |