Figure 2From: Cathodoluminescence and Cross-sectional Transmission Electron Microscopy Studies for Deformation Behaviors of GaN Thin Films Under Berkovich NanoindentationRoom temperature CL images (right figures) of indentation at loads of (a) 10, (b) 50, and (c) 100 mN. CL imaging conditions: electron beam energy = 20 keV, CL wavelength = 366 nm. Left figures: corresponding SE images. (d) Schema of an indentation figure as imaged by SEM/CLBack to article page