Figure 3From: Mechanical Deformation Behavior of Nonpolar GaN Thick Films by Berkovich NanoindentationSEM images of indented regions with the side perpendicular to the surface slates (a) and parallel to the slates (d) obtained at load of 500 mN on nonpolar GaN.b ande are the corresponding panchromatic CL images of (a) and (d), respectively.c andf are magnified SEM images in the perpendicular and parallel cases at 500 mNBack to article page