Figure 6From: Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force MicroscopyTiN film obtained atW S = 150 W:a Topography in AFM contact mode. Surface area: (5 × 5) μm2Grey-scale range: 288 nm.b UFM image simultaneously recorded with (a).c Topography in AFM contact mode. Surface area: (1 × 1) μm2.Grey-scale range: 64 nm.d Derivative image of (c).e UFM image over the squared region in (a,b)Back to article page