Figure 7From: Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force MicroscopyTiN film obtained atW S = 200 W.a Topography in AFM contact mode. Surface area: (5 × 5) μm2 Grey- scale range: 119 nm.b UFM image simultaneously recorded with (a). Thearrows indicate softer UFM regions and their corresponding location in the AFM imageBack to article page