Figure 5
a SEM image of an Al2O3 thin film (20 nm) deposited on a Si substrate and simultaneously drilled by the near-field enhancement of a single nanosecond laser pulse, which is produced by a lattice of SiO2 spheres (R = 250 nm); b AFM image and c depth profile of gold nanodots created on silicon substrates by the LF-PAM-based process