Figure 3From: Micro-Raman Mapping of 3C-SiC Thin Films Grown by Solid–Gas Phase Epitaxy on Si (111) a Top view of the sample of 3C-SiC obtained by optical microscopy (scale in μm), the red arrow shows the mapping line. Results of Raman line mapping for b peak position, c linewidth and d peak intensity of the TO phonon mode for the 3C-SiC/Si sample (dashed lines correspond to the centres of the voids)Back to article page